Invention Application
- Patent Title: MICROWAVE HEATING APPARATUS AND PROCESSING METHOD
- Patent Title (中): 微波加热装置和加工方法
-
Application No.: US14043779Application Date: 2013-10-01
-
Publication No.: US20140117009A1Publication Date: 2014-05-01
- Inventor: Nobuhiko YAMAMOTO
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2012-238795 20121030
- Main IPC: H05B6/64
- IPC: H05B6/64

Abstract:
A microwave heating apparatus includes, a processing chamber, a microwave introducing unit, a support member and a heat assist member. The processing chamber is configured to accommodate an object to be processed, the processing chamber having a top wall, a bottom wall and a sidewall. The microwave introducing unit is configured to generate a microwave for heating the object and introduce the microwave into the processing chamber. The support member is configured to support the object by contact with the object in the processing chamber. The heating assist member is configured to generate heat by absorbing the microwave and assist heating of the object by radiant heat, the heating assist member disposed to be separated from the object by the support member.
Information query