发明申请
- 专利标题: SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US14151441申请日: 2014-01-09
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公开(公告)号: US20140124847A1公开(公告)日: 2014-05-08
- 发明人: Huilong Zhu , Qingqing Liang , Huicai Zhong
- 申请人: Huilong Zhu , Qingqing Liang , Huicai Zhong
- 优先权: CN201210441393.0 20121107
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L21/28 ; H01L29/66
摘要:
Semiconductor devices and methods for manufacturing the same are disclosed. In one aspect, the method comprises forming a first shielding layer on a substrate, and forming one of source and drain regions with the first shielding layer as a mask. Then, forming a second shielding layer on the substrate, and forming the other of the source and drain regions with the second shielding layer as a mask. Then, removing a portion of the second shielding layer which is next to the other of the source and drain regions. Lastly, forming a first gate dielectric layer, a floating gate layer, and a second gate dielectric layer, and forming a gate conductor as a spacer on a sidewall of a remaining portion of the second shielding layer.
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