发明申请
- 专利标题： Combinatorial Tool for Mechanically-Assisted Surface Polishing and Cleaning
- 专利标题（中）： 用于机械辅助表面抛光和清洁的组合工具
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申请号： US13671478申请日： 2012-11-07
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公开(公告)号： US20140127974A1公开(公告)日： 2014-05-08
- 发明人: Kim Van Berkel , Aaron T. Francis , Frank C. Ma , George Mirth
- 申请人： INTERMOLECULAR, INC.
- 申请人地址： US CA San Jose
- 专利权人： INTERMOLECULAR, INC.
- 当前专利权人： INTERMOLECULAR, INC.
- 当前专利权人地址： US CA San Jose
- 主分类号： B24B37/00
- IPC分类号： B24B37/00 ; B24B37/10 ; B24B37/26
摘要：
Polishing and cleaning techniques are combinatorially processed and evaluated. A polishing system can include a reactor assembly having multiple reaction chambers, with at least a reaction chamber including a rotatable polishing head, slurry and chemical distribution, chemical and water rinse, and slurry and fluid removal. Different downward forces can be applied to the polishing heads for evaluating optimum process conditions. Channels in the polishing pads can redistribute slurry and chemical to the polishing area.
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