Invention Application
US20140166051A1 APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING DEBRIS IN A CONTROLLED PRESSURE ENVIRONMENT
审中-公开
用于分离气体并减轻控制压力环境中的破坏的装置,系统和方法
- Patent Title: APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING DEBRIS IN A CONTROLLED PRESSURE ENVIRONMENT
- Patent Title (中): 用于分离气体并减轻控制压力环境中的破坏的装置,系统和方法
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Application No.: US14105986Application Date: 2013-12-13
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Publication No.: US20140166051A1Publication Date: 2014-06-19
- Inventor: Karl R. Umstadter , Michael P. Kanouff , Rudy Garcia , Mike Romero
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Main IPC: B05B1/00
- IPC: B05B1/00

Abstract:
An assembly, including: a nozzle including a first chamber with a first orifice arranged to receive a stream of gas; a second chamber with a second orifice to emit the stream; a throat connecting the nozzle chambers; and a collector including: top and bottom walls with first and second openings; a third chamber bounded by the top and bottom walls and including a third opening connected to the second orifice to receive the stream; and a fourth opening. The first chamber tapers from the first orifice to the throat. The second chamber expands in size from the throat to the second orifice. The third chamber expands in size from the third opening to the fourth opening. The collector is arranged to: entrain, in the stream, debris entering the third chamber through first or second opening; and emit the stream, with the entrained debris, from the fourth opening.
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