发明申请
US20140175515A1 NONPLANAR III-N TRANSISTORS WITH COMPOSITIONALLY GRADED SEMICONDUCTOR CHANNELS
有权
具有组成分级半导体通道的非尼龙III-N晶体管
- 专利标题: NONPLANAR III-N TRANSISTORS WITH COMPOSITIONALLY GRADED SEMICONDUCTOR CHANNELS
- 专利标题(中): 具有组成分级半导体通道的非尼龙III-N晶体管
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申请号: US13725546申请日: 2012-12-21
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公开(公告)号: US20140175515A1公开(公告)日: 2014-06-26
- 发明人: Han Wui THEN , Sansaptak DASGUPTA , Marko RADOSAVLJEVIC , Benjamin CHU-KUNG , Seung Hoon SUNG , Sanaz K. GARDNER , Robert S. CHAU
- 申请人: Han Wui THEN , Sansaptak DASGUPTA , Marko RADOSAVLJEVIC , Benjamin CHU-KUNG , Seung Hoon SUNG , Sanaz K. GARDNER , Robert S. CHAU
- 主分类号: H01L29/772
- IPC分类号: H01L29/772 ; H01L29/66
摘要:
A III-N semiconductor channel is compositionally graded between a transition layer and a III-N polarization layer. In embodiments, a gate stack is deposited over sidewalls of a fin including the graded III-N semiconductor channel allowing for formation of a transport channel in the III-N semiconductor channel adjacent to at least both sidewall surfaces in response to a gate bias voltage. In embodiments, a gate stack is deposited completely around a nanowire including a III-N semiconductor channel compositionally graded to enable formation of a transport channel in the III-N semiconductor channel adjacent to both the polarization layer and the transition layer in response to a gate bias voltage.
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