发明申请
- 专利标题: Method For Detaching A Semiconductor Chip From A Foil
- 专利标题(中): 从铝箔上分离半导体芯片的方法
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申请号: US14085693申请日: 2013-11-20
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公开(公告)号: US20140196853A1公开(公告)日: 2014-07-17
- 发明人: Ernst Barmettler , Irving Rodriguez
- 申请人: Besi Switzerland AG
- 申请人地址: CH Cham
- 专利权人: Besi Switzerland AG
- 当前专利权人: Besi Switzerland AG
- 当前专利权人地址: CH Cham
- 优先权: CH2518/12 20121123
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/683
摘要:
The invention relates to the prepeeling phase of methods for detaching a semiconductor chip from a foil. According to a first aspect, the invention relates to the determination of time periods, which each defines a duration of a prepeeling step. In a setup phase, the following steps are carried out for each prepeeling step: Initiating the method step; Repeating the two steps Recording of an image of the semiconductor chip and assignment of a time period to the image which has passed since the initiation of the prepeeling step, and Checking whether in the image a peripheral region of the semiconductor chip is darker than a predetermined brightness value; until the check leads to the result that no peripheral region of the semiconductor chip is darker than the predetermined brightness value. According to a second aspect, the detachment of the semiconductor chip from the foil is monitored in realtime.
公开/授权文献
- US09240334B2 Method for detaching a semiconductor chip from a foil 公开/授权日:2016-01-19
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