发明申请
US20140238301A1 PLASMA PROCESSING APPARATUS 有权
等离子体加工设备

  • 专利标题: PLASMA PROCESSING APPARATUS
  • 专利标题(中): 等离子体加工设备
  • 申请号: US14233669
    申请日: 2013-06-20
  • 公开(公告)号: US20140238301A1
    公开(公告)日: 2014-08-28
  • 发明人: Shinya Akano
  • 申请人: CHUGAI RO CO., LTD.
  • 申请人地址: JP Osaka-shi, Osaka
  • 专利权人: CHUGAI RO CO., LTD.
  • 当前专利权人: CHUGAI RO CO., LTD.
  • 当前专利权人地址: JP Osaka-shi, Osaka
  • 优先权: JP2012-180141 20120815
  • 国际申请: PCT/JP2013/066976 WO 20130620
  • 主分类号: H01J37/32
  • IPC分类号: H01J37/32
PLASMA PROCESSING APPARATUS
摘要:
The present invention provides a plasma processing apparatus capable of bringing plasma close to a processing target and separating the plasma from the processing target. The plasma processing apparatus 1 according to the present invention has a chamber internally having a holding space 2a in which a processing target object 5 is held, and a plasma space 2b in which plasma is to be formed, a plasma gun 3 for emitting electrons into the plasma space 2b to form the plasma, and at least one pair of position-adjustable opposed magnets 4 for forming a magnetic flux passing across the chamber 2, between the holding space 2a and the plasma space 2b.
公开/授权文献
信息查询
0/0