发明申请
- 专利标题: INSPECTION OR OBSERVATION APPARATUS AND SAMPLE INSPECTION OR OBSERVATION METHOD
- 专利标题(中): 检查或观察装置和样本检查或观察方法
-
申请号: US14349630申请日: 2012-09-03
-
公开(公告)号: US20140246583A1公开(公告)日: 2014-09-04
- 发明人: Yusuke Ominami , Mami Konomi , Sukehiro Ito , Tomohisa Ohtaki , Shinsuke Kawanishi
- 申请人: Yusuke Ominami , Mami Konomi , Sukehiro Ito , Tomohisa Ohtaki , Shinsuke Kawanishi
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-220606 20111005
- 国际申请: PCT/JP2012/072290 WO 20120903
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/26
摘要:
Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.
公开/授权文献
信息查询