发明申请
- 专利标题: SIMULTANEOUS PROCESSING OF MULTIPLE PHOTONIC DEVICE LAYERS
- 专利标题(中): 多个光子器件层的同时处理
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申请号: US13789440申请日: 2013-03-07
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公开(公告)号: US20140254978A1公开(公告)日: 2014-09-11
- 发明人: Brian Koch , Erik Norberg , Alexander W. Fang , Jae Shin , Gregory Alan Fish
- 申请人: Brian Koch , Erik Norberg , Alexander W. Fang , Jae Shin , Gregory Alan Fish
- 主分类号: H01L21/822
- IPC分类号: H01L21/822 ; G02B6/13
摘要:
Embodiments of the invention describe photonic integrated circuits (PICs) formed using simultaneous fabrication operations performed on photonic device layers. Each device of a PIC may be made from different optimized materials by growing the materials separately, cutting pieces of the different materials and bonding these pieces to a shared wafer. Embodiments of the invention bond photonic device layers so that shared (i.e., common) processing operations may be utilized to make more than one device simultaneously. Embodiments of the invention allow for simpler, more cost effective fabrication of PICs and improve photonic device performance and reliability.
公开/授权文献
- US09322996B2 Simultaneous processing of multiple photonic device layers 公开/授权日:2016-04-26
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