Invention Application
- Patent Title: LIGHT DETECTION DEVICE
- Patent Title (中): 光检测装置
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Application No.: US14352429Application Date: 2012-08-02
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Publication No.: US20140263975A1Publication Date: 2014-09-18
- Inventor: Terumasa Nagano , Noburo Hosokawa , Tomofumi Suzuki , Takashi Baba
- Applicant: Terumasa Nagano , Noburo Hosokawa , Tomofumi Suzuki , Takashi Baba
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2011-232106 20111021
- International Application: PCT/JP2012/069730 WO 20120802
- Main IPC: G01J1/42
- IPC: G01J1/42 ; H01L27/144

Abstract:
A semiconductor light detection element includes a plurality of avalanche photodiodes operating in Geiger mode and formed in a semiconductor substrate, quenching resistors connected in series to the respective avalanche photodiodes and arranged on a first principal surface side of the semiconductor substrate, and a plurality of through-hole electrodes electrically connected to the quenching resistors and formed so as to penetrate the semiconductor substrate from the first principal surface side to a second principal surface side. A mounting substrate includes a plurality of electrodes arranged corresponding to the respective through-hole electrodes on a third principal surface side. The through-hole electrodes and the electrodes are electrically connected through bump electrodes, and a side surface of the semiconductor substrate and a side surface of a glass substrate are flush with each other.
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