Invention Application
- Patent Title: INTEGRATED MULTI-CHIP MODULE OPTICAL INTERCONNECT PLATFORM
- Patent Title (中): 集成多芯片模块光学互连平台
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Application No.: US14298875Application Date: 2014-06-06
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Publication No.: US20140264400A1Publication Date: 2014-09-18
- Inventor: Michal Lipson , Yoon Ho Lee
- Applicant: Cornell University
- Applicant Address: US NY Ithaca
- Assignee: Cornell University
- Current Assignee: Cornell University
- Current Assignee Address: US NY Ithaca
- Main IPC: H01L25/16
- IPC: H01L25/16 ; H01L33/58 ; H01L25/00 ; H01L31/0232

Abstract:
Techniques, systems, and devices are disclosed to provide multilayer platforms for integrating semiconductor integrated circuit dies, optical waveguides and photonic devices to provide intra-die or inter-die optical connectivity. For example, an integrated semiconductor device having integrated circuits respectively formed on different semiconductor integrated circuit dies is provided to include a carrier substrate structured to form openings on a top side of the carrier substrate; semiconductor integrated circuit dies fixed to bottom surfaces of the openings of the carrier substrate, each semiconductor integrated circuit die including a semiconductor substrate and an integrated circuit formed on the semiconductor substrate to include one or more circuit components, and each semiconductor integrated circuit die being structured to have a top surface substantially coplanar with the top side of the carrier substrate; and planar layers formed on top of the top surfaces of the semiconductor integrated circuit dies and the top side of the carrier substrate to include optical waveguides and photonic devices to provide (1) intra-die optical connectivity for photonic devices associated with a semiconductor integrated circuit die, or (2) inter-die optical connectivity for photonic devices associated with different semiconductor integrated circuit dies.
Public/Granted literature
- US09620489B2 Integrated multi-chip module optical interconnect platform Public/Granted day:2017-04-11
Information query
IPC分类: