发明申请
- 专利标题: LOGIC CHIP INCLUDING EMBEDDED MAGNETIC TUNNEL JUNCTIONS
- 专利标题(中): 逻辑芯片,包括嵌入式磁性隧道结
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申请号: US13994715申请日: 2013-03-15
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公开(公告)号: US20140264668A1公开(公告)日: 2014-09-18
- 发明人: Kevin J. Lee , Tahir Ghani , Joseph M. Steigerwald , John H. Epple , Yih Wang
- 申请人: Kevin J. Lee , Tahir Ghani , Joseph M. Steigerwald , John H. Epple , Yih Wang
- 国际申请: PCT/US2013/031994 WO 20130315
- 主分类号: H01L43/02
- IPC分类号: H01L43/02 ; H01L43/12
摘要:
An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory (STT-MRAM) within a logic chip. The STT-MRAM includes a magnetic tunnel junction (MTJ) that has an upper MTJ layer, a lower MTJ layer, and a tunnel barrier directly contacting the upper MTJ layer and the lower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layer sidewall and the lower MTJ layer includes a lower MTJ sidewall horizontally offset from the upper MTJ layer. Another embodiment includes a memory area, comprising a MTJ, and a logic area located on a substrate; wherein a horizontal plane intersects the MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILD material included in the logic area, the first and second ILD materials being unequal to one another. Other embodiments are described herein.
公开/授权文献
- US09660181B2 Logic chip including embedded magnetic tunnel junctions 公开/授权日:2017-05-23
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