Invention Application
- Patent Title: PROCESSING SYSTEMS AND METHODS FOR HALIDE SCAVENGING
- Patent Title (中): 加工系统和方法
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Application No.: US14188344Application Date: 2014-02-24
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Publication No.: US20140271097A1Publication Date: 2014-09-18
- Inventor: Anchuan WANG , Xinglong CHEN , Zihui LI , Hiroshi HAMANA , Zhijun CHEN , Ching-Mei HSU , Jiayin HUANG , Nitin K. INGLE , Dmitry LUBOMIRSKY , Shankar VENKATARAMAN , Randhir THAKUR
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
Systems, chambers, and processes are provided for controlling process defects caused by moisture contamination. The systems may provide configurations for chambers to perform multiple operations in a vacuum or controlled environment. The chambers may include configurations to provide additional processing capabilities in combination chamber designs. The methods may provide for the limiting, prevention, and correction of aging defects that may be caused as a result of etching processes performed by system tools.
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