发明申请
US20140272194A1 ORGANOAMINOSILANE PRECURSORS AND METHODS FOR MAKING AND USING SAME
有权
有机氨基甲酸酯前体及其制备和使用方法
- 专利标题： ORGANOAMINOSILANE PRECURSORS AND METHODS FOR MAKING AND USING SAME
- 专利标题（中）： 有机氨基甲酸酯前体及其制备和使用方法
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申请号： US14291818申请日： 2014-05-30
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公开(公告)号： US20140272194A1公开(公告)日： 2014-09-18
- 发明人: Manchao Xiao , Xinjian Lei , Bing Han , Mark Leonard O'Neill , Ronald Martin Pearlstein , Richard Ho , Haripin Chandra , Agnes Derecskei-Kovacs
- 申请人： Manchao Xiao , Xinjian Lei , Bing Han , Mark Leonard O'Neill , Ronald Martin Pearlstein , Richard Ho , Haripin Chandra , Agnes Derecskei-Kovacs
- 申请人地址： US PA Allentown
- 专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址： US PA Allentown
- 主分类号： C23C16/24
- IPC分类号： C23C16/24 ; C23C16/32 ; C23C16/34 ; C23C16/40 ; C23C16/30
摘要：
Described herein are organoaminosilane precursors which can be used to deposit silicon containing films which contain silicon and methods for making these precursors. Also disclosed herein are deposition methods for making silicon-containing films or silicon containing films using the organoaminosilane precursors described herein. Also disclosed herein are the vessels that comprise the organoaminosilane precursors or a composition thereof that can be used, for example, to deliver the precursor to a reactor in order to deposit a silicon-containing film.