Invention Application
US20140273485A1 ELECTRIC PRESSURE SYSTEMS FOR CONTROL OF PLASMA PROPERTIES AND UNIFORMITY
有权
用于控制等离子体性质和均匀性的电压系统
- Patent Title: ELECTRIC PRESSURE SYSTEMS FOR CONTROL OF PLASMA PROPERTIES AND UNIFORMITY
- Patent Title (中): 用于控制等离子体性质和均匀性的电压系统
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Application No.: US14206518Application Date: 2014-03-12
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Publication No.: US20140273485A1Publication Date: 2014-09-18
- Inventor: Jianping Zhao , Lee Chen , Merritt Funk , Zhiying Chen
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/3065 ; H01L21/02

Abstract:
This disclosure relates to a plasma processing system for controlling plasma density near the edge or perimeter of a substrate that is being processed. The plasma processing system may include a plasma chamber that can receive and process the substrate using plasma for etching the substrate, doping the substrate, or depositing a film on the substrate. This disclosure relates to a plasma processing system for controlling plasma density near the edge or perimeter of a substrate that is being processed. In one embodiment, the plasma density may be controlled by reducing the rate of loss of ions to the chamber wall during processing. This may include biasing a dual electrode ring assembly in the plasma chamber to alter the potential difference between the chamber wall region and the bulk plasma region.
Public/Granted literature
- US09209032B2 Electric pressure systems for control of plasma properties and uniformity Public/Granted day:2015-12-08
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