Invention Application
US20140307242A1 METHOD AND APPARATUS FOR PRINTING PERIODIC PATTERNS USING MULTIPLE LASERS 审中-公开
使用多个激光打印周期性图案的方法和装置

  • Patent Title: METHOD AND APPARATUS FOR PRINTING PERIODIC PATTERNS USING MULTIPLE LASERS
  • Patent Title (中): 使用多个激光打印周期性图案的方法和装置
  • Application No.: US14123330
    Application Date: 2012-06-01
  • Publication No.: US20140307242A1
    Publication Date: 2014-10-16
  • Inventor: Harun SolakFrancis ClubeChristian Dais
  • Applicant: Harun SolakFrancis ClubeChristian Dais
  • Applicant Address: CH Villigen PSI
  • Assignee: EULITHA A.G.
  • Current Assignee: EULITHA A.G.
  • Current Assignee Address: CH Villigen PSI
  • International Application: PCT/IB2012/052778 WO 20120601
  • Main IPC: G03F7/20
  • IPC: G03F7/20
METHOD AND APPARATUS FOR PRINTING PERIODIC PATTERNS USING MULTIPLE LASERS
Abstract:
A method for printing a periodic pattern of features into a photosensitive layer includes providing a mask bearing a mask pattern, providing a substrate bearing the layer, arranging the substrate parallel to the mask, providing a number of lasers having a plurality of peak wavelengths, forming from the light a beam for illuminating the mask with a spectral distribution of exposure dose and a degree of collimation, illuminating the mask with the beam such that the light of each wavelength transmitted by the mask pattern forms a range of transversal intensity distributions between Talbot planes and exposes the photosensitive layer to an image component. The separation and the spectral distribution are arranged so that the superposition of the components is equivalent to an average of the range of transversal intensity distributions formed by light of one wavelength and the collimation is arranged so that the features are resolved.
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