Invention Application
- Patent Title: MULTI-LAYER CERAMIC VACUUM TO ATMOSPHERE ELECTRIC FEED THROUGH
- Patent Title (中): 多层陶瓷真空通过大气电力进料
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Application No.: US14256828Application Date: 2014-04-18
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Publication No.: US20140318855A1Publication Date: 2014-10-30
- Inventor: Robert Haynes , Mehran Nasser-Ghodsi
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Main IPC: H02G3/22
- IPC: H02G3/22 ; H05K3/40 ; H02G1/14

Abstract:
Embodiments of this invention use multi-layer ceramic substrate with one or more hermetically sealed and filled metal vias with smaller pitch and size in combination with flexible printed circuit cables and interposers to provide a custom electric feed through for vacuum to atmosphere chambers. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Public/Granted literature
- US09591770B2 Multi-layer ceramic vacuum to atmosphere electric feed through Public/Granted day:2017-03-07
Information query
IPC分类: