发明申请
- 专利标题： PHYSICAL QUANTITY DETECTION DEVICE AND PHYSICAL QUANTITY DETECTOR
- 专利标题（中）： 物理量检测装置和物理量检测器
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申请号： US14247349申请日： 2014-04-08
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公开(公告)号： US20140319628A1公开(公告)日： 2014-10-30
- 发明人: Taketomo Nakane , Yoshihiro Haseko , Yuki Shimazu
- 申请人： Taketomo Nakane , Yoshihiro Haseko , Yuki Shimazu
- 申请人地址： JP Tokyo
- 专利权人： MITSUMI ELECTRIC CO., LTD.
- 当前专利权人： MITSUMI ELECTRIC CO., LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2013-092363 20130425
- 主分类号： H01L23/10
- IPC分类号： H01L23/10 ; H01L29/82
摘要：
A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.