公开(公告)号：US20140319628A1

公开(公告)日：2014-10-30

申请号：US14247349

申请日：2014-04-08

申请人： Taketomo Nakane ,  Yoshihiro Haseko ,  Yuki Shimazu

发明人： Taketomo Nakane ,  Yoshihiro Haseko ,  Yuki Shimazu

IPC分类号： H01L23/10 ,  H01L29/82

CPC分类号： H01L23/10 ,  B81B7/0025 ,  B81B2201/0264 ,  G01L9/0042 ,  G01L9/0052 ,  H01L23/3121 ,  H01L23/564 ,  H01L29/84 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.

摘要翻译： 物理量检测装置包括玻璃基板，包括物理量检测部分的基板，并且在基板内形成有密封空间的玻璃基板的第一表面，并且形成在第二表面上的功能膜 玻璃基板与第一表面相对。 功能膜防止玻璃基板的第二表面与大气中的水分接触。

公开(公告)号：US20190154484A1

公开(公告)日：2019-05-23

申请号：US15759570

申请日：2016-09-23

申请人： Yoshihiro HASEKO ,  Yota YAMAMOTO

发明人： Yoshihiro HASEKO ,  Yota YAMAMOTO

IPC分类号： G01F1/692 ,  G01F1/684 ,  G01K7/16 ,  G01F15/00

摘要： A disclosed flow rate sensor (1) has a heat element (40) and a plurality of temperature detectors (30 through 33), and in a state in which the heat element (40) generates heat, a flow rate of a fluid flowing on the temperature detectors (30 through 33) is detected, based on temperature detection results of each of the temperature detectors (30 through 33). The flow rate sensor includes a semiconductor substrate having a frame shape with an opening, a diaphragm part (20) provided on the semiconductor substrate, and the heat element (40) and the plurality of temperature detectors (30 through 33) provided on the diaphragm part (20). The diaphragm part (20) has a thin film structure part (20t) that covers the opening, and in a plan view, the plurality of temperature detectors (30 through 33) are arranged in a periphery of the heat element (40).

公开(公告)号：US10739176B2

公开(公告)日：2020-08-11

申请号：US15759570

申请日：2016-09-23

申请人： Yoshihiro Haseko ,  Yota Yamamoto

发明人： Yoshihiro Haseko ,  Yota Yamamoto

IPC分类号： G01F1/688 ,  G01F1/692 ,  G01F1/684 ,  G01F15/00 ,  G01K7/16

摘要： A disclosed flow rate sensor has a heat element and a plurality of temperature detectors, and in a state in which the heat element generates heat, a flow rate of a fluid flowing on the temperature detectors is detected, based on temperature detection results of each of the temperature detectors. The flow rate sensor includes a semiconductor substrate having a frame shape with an opening, a diaphragm part provided on the semiconductor substrate, and the heat element and the plurality of temperature detectors provided on the diaphragm part. The diaphragm part has a thin film structure part that covers the opening, and in a plan view, the plurality of temperature detectors are arranged in a periphery of the heat element.

公开(公告)号：US09035401B2

公开(公告)日：2015-05-19

申请号：US14247349

申请日：2014-04-08

申请人： Taketomo Nakane ,  Yoshihiro Haseko ,  Yuki Shimazu

发明人： Taketomo Nakane ,  Yoshihiro Haseko ,  Yuki Shimazu

IPC分类号： H01L23/10 ,  G01L9/00 ,  H01L23/31 ,  H01L29/84 ,  H01L23/00

CPC分类号： H01L23/10 ,  B81B7/0025 ,  B81B2201/0264 ,  G01L9/0042 ,  G01L9/0052 ,  H01L23/3121 ,  H01L23/564 ,  H01L29/84 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.

摘要翻译： 物理量检测装置包括玻璃基板，包括物理量检测部分的基板，并且在基板内形成有密封空间的玻璃基板的第一表面，并且形成在第二表面上的功能膜 玻璃基板与第一表面相对。 功能膜防止玻璃基板的第二表面与大气中的水分接触。