Invention Application
- Patent Title: Multiple Radio Frequency Power Supply Control of Frequency and Phase
- Patent Title (中): 频率和相位的多射频电源控制
-
Application No.: US14249972Application Date: 2014-04-10
-
Publication No.: US20140320013A1Publication Date: 2014-10-30
- Inventor: David J. COUMOU , Michael L. KIRK , Daniel M. GILL
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS INSTRUMENTS, INC.
- Current Assignee: MKS INSTRUMENTS, INC.
- Current Assignee Address: US MA Andover
- Main IPC: H01J37/32
- IPC: H01J37/32
Abstract:
A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.
Public/Granted literature
- US09336995B2 Multiple radio frequency power supply control of frequency and phase Public/Granted day:2016-05-10
Information query
