公开(公告)号：US20180109230A1

公开(公告)日：2018-04-19

申请号：US15846922

申请日：2017-12-19

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuriy ELNER ,  Daniel M. GILL

IPC: H03F1/56 ,  H03F3/24 ,  H03F3/195

Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.

公开(公告)号：US20170018926A1

公开(公告)日：2017-01-19

申请号：US14797347

申请日：2015-07-13

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuiry ELNER ,  Daniel M. GILL

IPC: H02J3/12

CPC classification number: H01J37/32183 ,  H01J37/32082 ,  H01J37/32174 ,  H05H2001/4682

Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element to vary a ratio of power between the plurality of RF output signals. The first controller communicates a ratio control signal to the matching network, and the matching network controls the ratio tuning element in accordance with the ratio control signal. The RF controls system operates in a continuous and pulse mode of operation. The controller can also control the rise or fall of a pulse edge or a level or duration of incremental changes in the pulse edge.

Abstract translation: 一种射频（RF）控制系统，包括具有输出RF信号的功率放大器的RF发生器和控制器。 匹配网络接收RF信号并产生多个RF输出信号。 匹配网络包括比率调谐元件以改变多个RF输出信号之间的功率比。 第一控制器将比率控制信号传送到匹配网络，并且匹配网络根据比率控制信号来控制比率调谐元件。 RF控制系统以连续和脉冲操作模式工作。 控制器还可以控制脉冲边沿的上升或下降或脉冲边沿增量变化的电平或持续时间。

公开(公告)号：US20190333738A1

公开(公告)日：2019-10-31

申请号：US16509088

申请日：2019-07-11

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuriy ELNER ,  Daniel M. GILL ,  Richard PHAM

IPC: H01J37/32

Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.

公开(公告)号：US20140320013A1

公开(公告)日：2014-10-30

申请号：US14249972

申请日：2014-04-10

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Michael L. KIRK ,  Daniel M. GILL

IPC: H01J37/32

CPC classification number: H01J37/32082 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32935

Abstract: A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.

Abstract translation: 系统具有第一RF发生器和第二RF发生器。 第一个RF发生器控制第二个RF发生器的频率。 第一RF发生器包括电源，传感器和传感器信号处理单元。 传感器信号处理单元耦合到电源和传感器。 传感器信号处理单元缩放第一RF发生器的频率以控制第二RF发生器的频率。

公开(公告)号：US20210311448A1

公开(公告)日：2021-10-07

申请号：US17232950

申请日：2021-04-16

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Yuriy ELNER ,  Aung TOE ,  Daniel M. GILL ,  Eldridge M. MOUNT, IV ,  Shaun SMITH

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US20170054418A1

公开(公告)日：2017-02-23

申请号：US14828597

申请日：2015-08-18

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuiry ELNER ,  Daniel M. GILL

IPC: H03H7/38 ,  H03F1/56 ,  H03F3/19

CPC classification number: H03F1/56 ,  H03F3/195 ,  H03F3/245 ,  H03F2200/378 ,  H03F2200/387 ,  H03F2200/451

Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.

Abstract translation: 一种射频（RF）控制系统，包括具有输出RF信号的功率放大器的RF发生器和控制器。 匹配网络接收RF信号并产生至少一个RF输出信号。 在第一操作模式中，控制器能够调整RF信号的频率和匹配网络的调谐元件以实现阻抗匹配，并且在第二操作模式中，控制器仅允许调整匹配的调谐元件 网络实现阻抗匹配，同时将频率调整到目标频率。 RF控制系统以连续和脉冲操作模式工作。

公开(公告)号：US20190391547A1

公开(公告)日：2019-12-26

申请号：US16297799

申请日：2019-03-11

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Yuriy ELNER ,  Aung TOE ,  Daniel M. GILL ,  Eldridge M. MOUNT, IV ,  Shaun SMITH

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US20170062186A1

公开(公告)日：2017-03-02

申请号：US14837512

申请日：2015-08-27

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuiry ELNER ,  Daniel M. GILL ,  Richard PHAM

IPC: H01J37/32

CPC classification number: H01J37/32155 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/32165 ,  H01J37/32972 ,  H01J37/3299 ,  H01J2237/334

Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.

Abstract translation: 用于控制对诸如等离子体室的负载施加电力的RF电源的系统包括主电源和从电源。 主电源向从电源提供诸如频率和相位信号的控制信号。 从电源接收频率和相位信号，并且还接收从负载检测到的频谱发射特性的信号。 从射频电源改变施加到负载的RF输出信号的相位和功率。 功率变化控制离子分布函数的宽度，改变相位控制离子分布的峰值。 根据RF发生器和负载之间的耦合，检测不同的光谱发射，包括一次谐波，二次谐波，并且在双频驱动系统的情况下，互调失真。