公开(公告)号：US20140320013A1

公开(公告)日：2014-10-30

申请号：US14249972

申请日：2014-04-10

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Michael L. KIRK ,  Daniel M. GILL

IPC: H01J37/32

CPC classification number: H01J37/32082 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32935

Abstract: A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.

Abstract translation: 系统具有第一RF发生器和第二RF发生器。 第一个RF发生器控制第二个RF发生器的频率。 第一RF发生器包括电源，传感器和传感器信号处理单元。 传感器信号处理单元耦合到电源和传感器。 传感器信号处理单元缩放第一RF发生器的频率以控制第二RF发生器的频率。