发明申请
- 专利标题: LIGHT DETECTION DEVICE
- 专利标题(中): 光检测装置
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申请号: US14352398申请日: 2012-08-02
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公开(公告)号: US20140327100A1公开(公告)日: 2014-11-06
- 发明人: Terumasa Nagano , Noburo Hosokawa , Tomofumi Suzuki , Takashi Baba
- 申请人: Terumasa Nagano , Noburo Hosokawa , Tomofumi Suzuki , Takashi Baba
- 申请人地址: JP Hamamatsu-shi, Shizuoka
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu-shi, Shizuoka
- 优先权: JP2011-232104 20111021
- 国际申请: PCT/JP2012/069728 WO 20120802
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
A semiconductor light detection element has a plurality of channels, each of which consists of a photodiode array including a plurality of avalanche photodiodes operating in Geiger mode, quenching resistors connected in series to the respective avalanche photodiodes, and signal lines to which the quenching resistors are connected in parallel. A mounting substrate is configured so that a plurality of electrodes corresponding to the respective channels are arranged on a third principal surface side and so that a signal processing unit for processing output signals from the respective channels is arranged on a fourth principal surface side. In a semiconductor substrate, through-hole electrodes electrically connected to the signal lines are formed for the respective channels. The through-hole electrodes and the electrodes are electrically connected through bump electrodes.
公开/授权文献
- US08969990B2 Light detection device 公开/授权日:2015-03-03
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