- 专利标题: PRESSURE FEED CONTAINER, STORAGE METHOD USING THE PRESSURE FEED CONTAINER, AND METHOD FOR TRANSFERRING LIQUID USING THE PRESSURE FEED CONTAINER
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申请号: US14280964申请日: 2014-05-19
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公开(公告)号: US20140339321A1公开(公告)日: 2014-11-20
- 发明人: Atsushi RYOKAWA , Shuhei YAMADA , Masahiro FUJITANI , Yosuke HASHIMOTO , Chiaki IDETA , Soichi KUMON , Masanori SAITO , Takashi SAIO
- 申请人: CENTRAL GLASS COMPANY, LIMITED
- 申请人地址: JP Yamaguchi
- 专利权人: CENTRAL GLASS COMPANY, LIMITED
- 当前专利权人: CENTRAL GLASS COMPANY, LIMITED
- 当前专利权人地址: JP Yamaguchi
- 优先权: JP2013-106428 20130520; JP2014-098680 20140512
- 主分类号: B05B9/04
- IPC分类号: B05B9/04 ; B65B31/00
摘要:
The present invention provides a pressure feed container capable of ensuring the cleanliness of a liquid such as a protective film-forming liquid chemical or a protective film-forming liquid chemical kit for preparing the liquid chemical even after long-term storage, and also capable of suppressing electrostatic charge in the liquid. The present invention provides a pressure feed container configured to store a protective film-forming liquid chemical or a protective film-forming liquid chemical kit that is mixed into the protective film-forming liquid chemical, and to transfer a liquid upon application of pressure to the inside of the container, the protective film-forming liquid chemical being for forming a water-repellent protective film on at least surfaces of recessed portions of an uneven pattern formed on a surface of a wafer containing a silicon element at least at a part of the uneven pattern. The protective film-forming liquid chemical contains a nonaqueous organic solvent, a silylation agent, and an acid or a base; the protective film-forming liquid chemical kit includes a treatment liquid A containing a nonaqueous organic solvent and a silylation agent, and a treatment liquid B containing a nonaqueous organic solvent and an acid or a base; the pressure feed container includes a container body configured to contain a liquid selected from the protective film-forming liquid chemical, the treatment liquid A, and the treatment liquid B, and a liquid flowing nozzle configured such that the liquid flows therethrough to be introduced into the container body and/or to be extracted from the container body; the container body includes a metal can body in which a portion configured to contact the liquid is formed from a resin material; the liquid flowing nozzle is provided with a neutralization mechanism configured to reduce electrostatic potential in the liquid; and a liquid contact portion of the liquid flowing nozzle excluding the neutralization mechanism is formed from a resin material.
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