Invention Application
- Patent Title: VCSEL AND MANUFACTURING METHOD OF THE SAME
- Patent Title (中): VCSEL及其制造方法
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Application No.: US14195778Application Date: 2014-03-03
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Publication No.: US20140348194A1Publication Date: 2014-11-27
- Inventor: Hyundai PARK , Gyungock KIM
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2013-0059190 20130524; KR10-2013-0112714 20130923
- Main IPC: H01S5/183
- IPC: H01S5/183

Abstract:
Provided is a vertical-cavity surface-emitting laser (VCSEL). The VCSEL includes a silicon substrate, a lower reflective layer disposed on the silicon substrate, a light generation laser disposed on the lower reflective layer, and an upper reflective layer disposed on the light generation layer. The lower reflective layer, the light generation layer, and the upper reflective layer may include a III-V semiconductor light source-active layer monolithically integrated on a first impurity layer by wafer bonding.
Public/Granted literature
- US09118160B2 VCSEL and manufacturing method of the same Public/Granted day:2015-08-25
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