Invention Application
US20140348194A1 VCSEL AND MANUFACTURING METHOD OF THE SAME 有权
VCSEL及其制造方法

VCSEL AND MANUFACTURING METHOD OF THE SAME
Abstract:
Provided is a vertical-cavity surface-emitting laser (VCSEL). The VCSEL includes a silicon substrate, a lower reflective layer disposed on the silicon substrate, a light generation laser disposed on the lower reflective layer, and an upper reflective layer disposed on the light generation layer. The lower reflective layer, the light generation layer, and the upper reflective layer may include a III-V semiconductor light source-active layer monolithically integrated on a first impurity layer by wafer bonding.
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