发明申请
- 专利标题: LASER PULSE FOCUSING
- 专利标题(中): 激光脉冲聚焦
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申请号: US14369824申请日: 2012-11-14
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公开(公告)号: US20140361145A1公开(公告)日: 2014-12-11
- 发明人: Klaus Vogler , Olaf Kittelmann , Matthias Foesel , Christof Donitzky
- 申请人: WAVELIGHT GMBH
- 申请人地址: DE Erlangen
- 专利权人: WAVELIGHT GMBH
- 当前专利权人: WAVELIGHT GMBH
- 当前专利权人地址: DE Erlangen
- 优先权: EPPCTEP2012/072567 20121114
- 国际申请: PCT/EP2012/072567 WO 20121114
- 主分类号: H01S3/00
- IPC分类号: H01S3/00
摘要:
In certain embodiments, a system (10) comprises a laser source (20), one or more optical elements (24), a monitoring device (28), and a control computer (30). The laser source (20) emits one or more laser pulses. The optical elements (24) change a pulse length of the laser pulses, and the monitoring device (28) measures the pulse length of the laser pulses to detect the change in the pulse length. The control computer (30) receives the measured pulse length from the monitoring device (28), determines one or more laser parameters that compensate for the change in the pulse length, and controls the laser source (20) according to the laser parameters.
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