Invention Application
- Patent Title: ABSOLUTE DISTANCE LASER INTERFEROMETER
- Patent Title (中): 绝对距离激光干扰仪
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Application No.: US14284756Application Date: 2014-05-22
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Publication No.: US20150019160A1Publication Date: 2015-01-15
- Inventor: Klaus Thurner , Khaled Karrai , Pierre-Francois Braun
- Applicant: attocube Systems AG
- Applicant Address: DE Munich
- Assignee: attocube Systems AG
- Current Assignee: attocube Systems AG
- Current Assignee Address: DE Munich
- Priority: EP13169159.4 20130524
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/00

Abstract:
A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
Public/Granted literature
- US09829306B2 Absolute distance laser interferometer Public/Granted day:2017-11-28
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