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公开(公告)号：US10260863B2
公开(公告)日：2019-04-16
申请号：US15307581
申请日：2015-04-29
Applicant: attocube systems AG
Inventor： Martin Zech , Klaus Thurner
Abstract: Interferometer (10) for the real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit (20) and a reflector unit (40). wherein the measurement unit (20) comprises a housing (21) with at least one wall made of heat-conducting material, wherein several measurement elements are arranged in the housing (21), wherein the measurement elements comprise: a laser source (22), a Peltier element (24) and a digital control (23) wherein the measurement elements are thermally coupled to the wall of the housing (21) made of heat-conducting material.
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公开(公告)号：US20150019160A1
公开(公告)日：2015-01-15
申请号：US14284756
申请日：2014-05-22
Applicant: attocube Systems AG
Inventor： Klaus Thurner , Khaled Karrai , Pierre-Francois Braun
CPC classification number: G01B9/02 , G01B9/02002 , G01B9/02003 , G01B9/02004 , G01B9/02007 , G01B11/00 , G01B2290/25
Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
Abstract translation: 用于绝对距离测量的装置包括用于发射由第一调制频率调制的第一可调谐频率的第一波长光和第二光源的第一可调谐光源，用于发射由第二调制频率调制的第二频率的第二波长光 。 光耦合器将第一波长光和第二波长光耦合到干涉仪腔中。 干涉仪检测器基于检测到的干涉图案提供干扰测量信号。 解调器单元通过利用第一调制频率的解调产生基于干扰测量信号的第一解调信号，并且以第二调制频率通过解调产生基于干扰测量信号的第二解调信号。 计算单元通过评估在第一可调谐频率和第二解调信号的扫描期间获取的第一解调信号来计算绝对距离。
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公开(公告)号：US09829306B2
公开(公告)日：2017-11-28
申请号：US14284756
申请日：2014-05-22
Applicant: attocube Systems AG
Inventor： Klaus Thurner , Khaled Karrai , Pierre-Francois Braun
CPC classification number: G01B9/02 , G01B9/02002 , G01B9/02003 , G01B9/02004 , G01B9/02007 , G01B11/00 , G01B2290/25
Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
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