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公开(公告)号:US20160181505A1
公开(公告)日:2016-06-23
申请号:US14975553
申请日:2015-12-18
Applicant: attocube systems AG
Inventor: Khaled Karrai , Pierre-Francois Braun , Georgy Maikov
IPC: H01L41/09
CPC classification number: H01L41/09 , F04B19/006 , F04B43/046 , H01L41/083 , H01L41/0833 , H01L41/0986 , H02N2/002 , H02N2/0055 , H02N2/026 , H02N2/103
Abstract: An electromechanical actuator includes an oscillation resonator having the shape of a rod. The oscillation resonator is divided by a dividing plane that is not parallel to the longitudinal direction of the oscillation resonator into a first resonator portion and a second resonator portion. At least the first resonator portion includes electromechanical means which, when activated, are configured to generate a 3-dimensional acoustic bulk wave are with a mode shape asymmetric with respect to the dividing plane.
Abstract translation: 机电致动器包括具有杆形状的振荡谐振器。 振荡谐振器由与振荡谐振器的纵向方向不平行的分割平面分割为第一谐振器部分和第二谐振器部分。 至少第一谐振器部分包括机电装置,其在被激活时被配置为产生具有相对于分割平面不对称的模式形状的3维声体积波。
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公开(公告)号:US10134975B2
公开(公告)日:2018-11-20
申请号:US14975553
申请日:2015-12-18
Applicant: attocube systems AG
Inventor: Khaled Karrai , Pierre-Francois Braun , Georgy Maikov
Abstract: An electromechanical actuator includes an oscillation resonator having the shape of a rod. The oscillation resonator is divided by a dividing plane that is not parallel to the longitudinal direction of the oscillation resonator into a first resonator portion and a second resonator portion. At least the first resonator portion includes electromechanical means which, when activated, are configured to generate a 3-dimensional acoustic bulk wave are with a mode shape asymmetric with respect to the dividing plane.
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公开(公告)号:US10825981B2
公开(公告)日:2020-11-03
申请号:US16171575
申请日:2018-10-26
Applicant: attocube systems AG
Inventor: Khaled Karrai , Pierre-Francois Braun , Georgy Maikov
Abstract: An electromechanical actuator includes a base part and an oscillation resonator having the shape of a rod. The electromechanical actuator further includes amount for mounting the oscillation resonator to the base part. The mount is configured to bear the oscillation resonator so as to be rotatable around an axis of the oscillation resonator rod relative to the base part. A driver member is mechanically coupled to the oscillation resonator. A slider or a rotator is configured to be moved by the driver member when the oscillation resonator is excited.
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公开(公告)号:US20150019160A1
公开(公告)日:2015-01-15
申请号:US14284756
申请日:2014-05-22
Applicant: attocube Systems AG
Inventor: Klaus Thurner , Khaled Karrai , Pierre-Francois Braun
CPC classification number: G01B9/02 , G01B9/02002 , G01B9/02003 , G01B9/02004 , G01B9/02007 , G01B11/00 , G01B2290/25
Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
Abstract translation: 用于绝对距离测量的装置包括用于发射由第一调制频率调制的第一可调谐频率的第一波长光和第二光源的第一可调谐光源,用于发射由第二调制频率调制的第二频率的第二波长光 。 光耦合器将第一波长光和第二波长光耦合到干涉仪腔中。 干涉仪检测器基于检测到的干涉图案提供干扰测量信号。 解调器单元通过利用第一调制频率的解调产生基于干扰测量信号的第一解调信号,并且以第二调制频率通过解调产生基于干扰测量信号的第二解调信号。 计算单元通过评估在第一可调谐频率和第二解调信号的扫描期间获取的第一解调信号来计算绝对距离。
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公开(公告)号:US20190067554A1
公开(公告)日:2019-02-28
申请号:US16171575
申请日:2018-10-26
Applicant: attocube systems AG
Inventor: Khaled Karrai , Pierre-Francois Braun , Georgy Maikov
Abstract: An electromechanical actuator includes a base part and an oscillation resonator having the shape of a rod. The electromechanical actuator further includes amount for mounting the oscillation resonator to the base part. The mount is configured to bear the oscillation resonator so as to be rotatable around an axis of the oscillation resonator rod relative to the base part. A driver member is mechanically coupled to the oscillation resonator. A slider or a rotator is configured to be moved by the driver member when the oscillation resonator is excited.
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公开(公告)号:US09829306B2
公开(公告)日:2017-11-28
申请号:US14284756
申请日:2014-05-22
Applicant: attocube Systems AG
Inventor: Klaus Thurner , Khaled Karrai , Pierre-Francois Braun
CPC classification number: G01B9/02 , G01B9/02002 , G01B9/02003 , G01B9/02004 , G01B9/02007 , G01B11/00 , G01B2290/25
Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
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