Invention Application
US20150021167A1 SYSTEM AND METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRON SPUTTERING (DMS) PROCESSES 有权
用于平衡脉冲双磁场溅射(DMS)过程中目标消耗的系统和方法

  • Patent Title: SYSTEM AND METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRON SPUTTERING (DMS) PROCESSES
  • Patent Title (中): 用于平衡脉冲双磁场溅射(DMS)过程中目标消耗的系统和方法
  • Application No.: US14333407
    Application Date: 2014-07-16
  • Publication No.: US20150021167A1
    Publication Date: 2015-01-22
  • Inventor: David Christie
  • Applicant: Advanced Energy Industries, Inc.
  • Main IPC: H01J37/34
  • IPC: H01J37/34 H01J37/32 C23C14/35
SYSTEM AND METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRON SPUTTERING (DMS) PROCESSES
Abstract:
A sputtering system and method are disclosed. The system has at least one dual magnetron pair having a first magnetron and a second magnetron, each magnetron configured to support target material. The system also has a DMS component having a DC power source in connection with switching components and voltage sensors. The DMS component is configured to independently control an application of power to each of the magnetrons, and to provide measurements of voltages at each of the magnetrons. The system also has one or more actuators configured to control the voltages at each of the magnetrons using the measurements provided by the DMS component. The DMS component and the one or more actuators are configured to balance the consumption of the target material by controlling the power and the voltage applied to each of the magnetrons, in response to the measurements of voltages at each of the magnetrons.
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