Invention Application
- Patent Title: ELECTROMECHANICAL TRANSDUCER, DROPLET EJECTION HEAD, AND METHOD FOR MANUFACTURING ELECTROMECHANICAL TRANSDUCER
- Patent Title (中): 机电传感器,喷射头,以及制造机电传感器的方法
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Application No.: US14322032Application Date: 2014-07-02
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Publication No.: US20150022592A1Publication Date: 2015-01-22
- Inventor: Tsutoh Aoyama , Masaru Shinkai , Masahiro Ishimori , Keiji Ueda , Kanshi Abe , Manabu Nishimura , Toshiaki Masuda
- Applicant: Tsutoh Aoyama , Masaru Shinkai , Masahiro Ishimori , Keiji Ueda , Kanshi Abe , Manabu Nishimura , Toshiaki Masuda
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2013-147730 20130716
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/31 ; B41J2/045

Abstract:
An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2θ-ω scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle θ. The full width at half maximum is not greater than 10 degrees.
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