发明申请
US20150047783A1 PRESSURE TRANSFER PLATE FOR PRESSURE TRANSFER OF A BONDING PRESSURE
审中-公开
用于压力传递压力的压力传递板
- 专利标题: PRESSURE TRANSFER PLATE FOR PRESSURE TRANSFER OF A BONDING PRESSURE
- 专利标题(中): 用于压力传递压力的压力传递板
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申请号: US14386046申请日: 2012-03-19
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公开(公告)号: US20150047783A1公开(公告)日: 2015-02-19
- 发明人: Jurgen Burggraf , Peter-Oliver Hangweier , Christian Perau
- 申请人: Jurgen Burggraf , Peter-Oliver Hangweier , Christian Perau
- 申请人地址: AT St. Florian am Inn
- 专利权人: EV GROUP E. THALLNER GMBH
- 当前专利权人: EV GROUP E. THALLNER GMBH
- 当前专利权人地址: AT St. Florian am Inn
- 国际申请: PCT/EP2012/054808 WO 20120319
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; B23K20/02
摘要:
A pressure transfer plate for transferring a bonding pressure, especially in thermocompression bonding, from a pressurization apparatus to a wafer, comprising a first pressure side for making contact with a pressurization apparatus, a second pressure side facing away from the first pressure side having an effective contact area for making contact with the wafer and pressurizing it, at least the effective contact area having a low adhesiveness relative to the wafer.
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