发明申请
US20150047783A1 PRESSURE TRANSFER PLATE FOR PRESSURE TRANSFER OF A BONDING PRESSURE 审中-公开
用于压力传递压力的压力传递板

PRESSURE TRANSFER PLATE FOR PRESSURE TRANSFER OF A BONDING PRESSURE
摘要:
A pressure transfer plate for transferring a bonding pressure, especially in thermocompression bonding, from a pressurization apparatus to a wafer, comprising a first pressure side for making contact with a pressurization apparatus, a second pressure side facing away from the first pressure side having an effective contact area for making contact with the wafer and pressurizing it, at least the effective contact area having a low adhesiveness relative to the wafer.
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