发明申请
- 专利标题： OPTICALLY-TRIGGERED SILICON CONTROLLED RECTIFIER AND METHOD OF FABRICATION OF THE SAME
- 专利标题（中）： 光触发硅控制整流器及其制造方法
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申请号： US14500378申请日： 2014-09-29
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公开(公告)号： US20150091048A1公开(公告)日： 2015-04-02
- 发明人: LELAND J. SPANGLER , KENSALL D. WISE
- 申请人： SCIENTIFIC APPLICATIONS & RESEARCH ASSOCIATES, INC
- 主分类号： H01L31/111
- IPC分类号： H01L31/111 ; H01L31/0232
摘要：
A device includes a semiconductor substrate having a plurality of doped layers forming first and second junctions. The semiconductor substrate includes a first surface and a second surface opposite the first surface. The device includes a plurality of waveguides defined by a plurality of glass inlaid channels defined within the first surface. Each of the plurality of glass inlaid channels extends through the second junction. The device includes a pattern of reflective elements associated with sidewalls of the plurality of glass inlaid channels to reflect light into the plurality of waveguides. A first electrically-conductive layer is disposed on the first surface and covers the plurality of glass inlaid channels.
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