发明申请
- 专利标题: Fabry-Perot interferometer and a method for producing the same
- 专利标题(中): 法布里 - 珀罗干涉仪及其制造方法
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申请号: US14399956申请日: 2013-05-08
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公开(公告)号: US20150124263A1公开(公告)日: 2015-05-07
- 发明人: Tapani Antila , Jussi Mäkynen , Christer Holmlund , Jarkko Antila , Jyrki Ollila , Heikki Saari
- 申请人: Tapani Antila , Jussi Mäkynen , Christer Holmlund , Jarkko Antila , Jyrki Ollila , Heikki Saari
- 申请人地址: FI VTT
- 专利权人: Teknologian tutkimuskeskus VTT
- 当前专利权人: Teknologian tutkimuskeskus VTT
- 当前专利权人地址: FI VTT
- 优先权: FI20125495 20120508
- 国际申请: PCT/FI2013/050510 WO 20130508
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
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