公开(公告)号：US20150124263A1

公开(公告)日：2015-05-07

申请号：US14399956

申请日：2013-05-08

申请人： Tapani Antila ,  Jussi Mäkynen ,  Christer Holmlund ,  Jarkko Antila ,  Jyrki Ollila ,  Heikki Saari

发明人： Tapani Antila ,  Jussi Mäkynen ,  Christer Holmlund ,  Jarkko Antila ,  Jyrki Ollila ,  Heikki Saari

IPC分类号： G01B9/02

CPC分类号： G02B26/001 ,  G01B9/02 ,  G01B2290/25 ,  G01J3/26 ,  Y10T29/49826

摘要： The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

摘要翻译： 本发明涉及一种法布里 - 珀罗干涉仪及其制造方法。 更具体地，本发明涉及可由一个或多个致动器（例如压电，电致伸缩或柔性电致动器）控制的法布里 - 珀罗干涉仪。 在现有技术中，存在在镜子之间实现足够小且均匀的间隙的问题。 在本发明中，在反射镜和致动器之间或两个反射镜之间使用中间结构（85a，85b，95a，95b，81a，81b，91a，91b，98a，98b）。 生产方法还包括在几个阶段测量间隙的宽度分布，并提供致动器的预致动。

公开(公告)号：US07500300B2

公开(公告)日：2009-03-10

申请号：US11873043

申请日：2007-10-16

申请人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

发明人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

IPC分类号： B23Q17/00 ,  G01L9/12

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

摘要翻译： 用于真空测量池的制造方法在与其相对的外围边缘处密封到主体的Al 2 O 3陶瓷或蓝宝石膜的相对侧上提供第一和第二Al 2 O 3陶瓷或蓝宝石外壳主体。 参考真空室和测量真空室位于膜的相对侧。 光学透明窗设置在第一壳体中，并且光学反射材料设置在膜的中心区域上。 透镜在光学透明窗口上方，用于光学连接到膜上的光反射材料，并且在参考真空室外部并且在距离光学透明窗口一定距离处的光纤馈送光通过透镜和窗口并进出到 膜上的光学反射材料，使得法布里 - 珀罗干涉仪检测膜偏转的水平。

公开(公告)号：US20070089524A1

公开(公告)日：2007-04-26

申请号：US11497226

申请日：2006-08-01

申请人： Urs Walchli ,  Per Bjorkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wuest

发明人： Urs Walchli ,  Per Bjorkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wuest

IPC分类号： G01L9/12

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A capacitive vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

摘要翻译： 电容式真空测量单元具有第一壳体和膜，Al 2 O 3 O 3陶瓷或蓝宝石两者。 膜是平面的，具有通过第一密封件连接到第一壳体的外围边缘以形成参考真空室。 与膜相对的Al 2 O 3 O 3陶瓷或蓝宝石的第二壳体通过第二密封件连接到膜的周边边缘，以形成测量真空室。 端口将真空测量单元连接到要测量的介质。 至少在第一壳体的中心区域中，形成光学透明窗口，并且至少膜的中心区域具有光学反射表面。 在参考真空室之外，与窗口相对并且距离窗口一定距离，布置光纤以将光输入和输出到膜的表面上。

公开(公告)号：US08792100B2

公开(公告)日：2014-07-29

申请号：US13258471

申请日：2010-03-31

申请人： Heikki Saari ,  Christer Holmlund ,  Uula Kantojarvi ,  Rami Mannila ,  Antti Lamminpaa ,  Pekka Teppola

发明人： Heikki Saari ,  Christer Holmlund ,  Uula Kantojarvi ,  Rami Mannila ,  Antti Lamminpaa ,  Pekka Teppola

IPC分类号： G01B9/02 ,  G01J3/45

CPC分类号： G01J3/51 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/12 ,  G01J3/26 ,  G01J3/32

摘要： The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

摘要翻译： 本发明涉及一种用于目标的光学测量的系统和方法，其中目标被照亮，主动照明，反射环境光或自发光，并且检测从目标或通过它接收的测量光束。 现有技术的光学测量系统通常包括机械滤光轮和光电倍增管，这导致设备昂贵，大尺寸并且通常不够准确和稳定。 本发明的目的是通过一种解决方案实现的，其中照明光束和/或测量光束被引导通过法布里 - 珀罗干涉仪或一组两个或多个法布里 - 珀罗干涉仪，以及法布里 - 珀罗干涉仪或法布里 - 珀罗干涉仪 一组两个或更多法布里 - 珀罗干涉仪在测量单个目标时被控制成不同的模式。 本发明可以应用于光学测量，其中例如测量反射率，靶的荧光吸收。

公开(公告)号：US20080110008A1

公开(公告)日：2008-05-15

申请号：US11873043

申请日：2007-10-16

申请人： Urs Walchli ,  Per Bjorkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wuest

发明人： Urs Walchli ,  Per Bjorkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wuest

IPC分类号： G01L7/08 ,  G01L19/08

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fibre outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

摘要翻译： 用于真空测量池的制造方法在Al 2 O 2的相对侧上提供第一和第二Al 2 O 3 O 3陶瓷或蓝宝石壳体 陶瓷或蓝宝石膜在其相对的外围边缘处密封到主体。 参考真空室和测量真空室位于膜的相对侧。 光学透明窗设置在第一壳体中，并且光学反射材料设置在膜的中心区域上。 透镜在光学透明窗口上方，用于光学连接到膜上的光反射材料，并且在参考真空室外部并且在与光学透明窗口相距一定距离处的光纤馈送光通过透镜和窗口并进出到 膜上的光学反射材料，使得法布里 - 珀罗干涉仪检测膜偏转的水平。

公开(公告)号：US07305888B2

公开(公告)日：2007-12-11

申请号：US11497226

申请日：2006-08-01

申请人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

发明人： Urs Wälchli ,  Per Björkman ,  Heikki Saari ,  Jarkko Antila ,  Hansjakob Hanselmann ,  Martin Wüest

IPC分类号： G01L9/12

CPC分类号： G01L9/0079 ,  Y10T29/49769 ,  Y10T29/49776

摘要： A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

摘要翻译： 真空测量单元具有第一壳体和膜，Al 2 N 3 O 3陶瓷或蓝宝石两者。 膜是平面的，具有通过第一密封件连接到第一壳体的外围边缘以形成参考真空室。 与膜相对的Al 2 O 3 O 3陶瓷或蓝宝石的第二壳体通过第二密封件连接到膜的周边边缘，以形成测量真空室。 端口将真空测量单元连接到要测量的介质。 至少在第一壳体的中心区域中，形成光学透明窗口，并且至少膜的中心区域具有光学反射表面。 在参考真空室之外，与窗口相对并且距离窗口一定距离，布置光纤以将光输入和输出到膜的表面上。

公开(公告)号：US20120038928A1

公开(公告)日：2012-02-16

申请号：US13258471

申请日：2010-03-31

申请人： Heikki Saari ,  Christer Holmlund ,  Uula Kantojarvi ,  Rami Mannila ,  Antti Lamminpaa ,  Pekka Teppola

发明人： Heikki Saari ,  Christer Holmlund ,  Uula Kantojarvi ,  Rami Mannila ,  Antti Lamminpaa ,  Pekka Teppola

IPC分类号： G01B9/02

CPC分类号： G01J3/51 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01J3/12 ,  G01J3/26 ,  G01J3/32

摘要： The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

摘要翻译： 本发明涉及一种用于目标的光学测量的系统和方法，其中目标被照亮，主动照明，反射环境光或自发光，并且检测从目标或通过它接收的测量光束。 现有技术的光学测量系统通常包括机械滤光轮和光电倍增管，这导致设备昂贵，大尺寸并且通常不够准确和稳定。 本发明的目的是通过一种解决方案实现的，其中照明光束和/或测量光束被引导通过法布里 - 珀罗干涉仪或一组两个或多个法布里 - 珀罗干涉仪，以及法布里 - 珀罗干涉仪或法布里 - 珀罗干涉仪 一组两个或更多法布里 - 珀罗干涉仪在测量单个目标时被控制成不同的模式。 本发明可以应用于光学测量，其中例如测量反射率，靶的荧光吸收。

公开(公告)号：US20100097613A1

公开(公告)日：2010-04-22

申请号：US12524335

申请日：2008-01-23

申请人： Heikki Saari

发明人： Heikki Saari

IPC分类号： G01J3/26 ,  G01B9/02 ,  G01J3/45

CPC分类号： G01J3/10 ,  G01J3/26 ,  G01J3/433 ,  G02B26/001

摘要： The invention relates to a spectrometer for material analysis and to a control method for a spectrometer. The spectrometer includes a radiant source (140) formed by multiple single radiation sources (141) having different central wavelengths, for generating a measuring signal, a measurement object (100) containing a material to be analyzed, at least one electrically tunable Fabry-Perot filter (120, 220) for the band pass filtering the measuring signal by at least two pass bands, and a detector (300, 400) for detecting said filtered measuring signals received from the measurement object (100). In accordance with the invention the spectrometer has means (312) for modulating each of the single radiation sources (141) and correspondingly means (307, 309) for demodulating the detected signals such that the signal from each single radiation source can be distinguished from each other in the detector (300, 400), and the spectrometer has means for detecting (300, 400) and demodulating (306, 307) multiple pass bands simultaneously.

摘要翻译： 本发明涉及用于材料分析的光谱仪和用于光谱仪的控制方法。 光谱仪包括由具有不同中心波长的多个单一辐射源（141）形成的用于产生测量信号的辐射源（140），包含待分析材料的测量对象（100），至少一个电可调节法布里 - 珀罗 滤波器（120,220），用于通过至少两个通带对测量信号进行带通滤波;以及检测器（300,400），用于检测从测量对象（100）接收的所述滤波的测量信号。 根据本发明，光谱仪具有用于调制单个辐射源（141）和对应装置（307,309）中的每一个的装置（312），用于解调检测到的信号，使得可以将每个单个辐射源的信号与每个辐射源 另一个在检测器（300,400）中，并且光谱仪具有同时检测（300,400）和解调（306,307）多个通带的装置。

公开(公告)号：US20100245832A1

公开(公告)日：2010-09-30

申请号：US12302013

申请日：2007-05-22

申请人： Heikki Saari

发明人： Heikki Saari

IPC分类号： G01B9/02

CPC分类号： G01J3/10 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36

摘要： The invention relates to a spectrometer, a spectrometric method and detector, and a new use of an interferometer. The spectrometer comprises a Fabry-Perot interferometer (120), to which light can be guided from the object (100) being investigated, in order to produce an interference image, and a detector (130) at which the interference image is aimed. The transmittance of the interferometer (120) is spectrally sliced to at least two separate wavelength bands. For its parts, the detector (130) is arranged to detect the interference image from at least two separate wavelength bands spatially. The detector is arranged to detect the said wavelength bands simultaneously, by exploiting the response of the image elements of the detector, calibrated as a function of the mirror gap of the interferometer, in order to detect simultaneously at least two different orders of the interference. With the aid of the invention, it is possible to implement spectrometric measurements more quickly, or to obtain more information on the object at one time.

摘要翻译： 本发明涉及一种光谱仪，光谱测量方法和检测器以及干涉仪的新用途。 光谱仪包括法布里 - 珀罗干涉仪（120），可以从正在研究的物体（100）引导光，以便产生干涉图像;以及检测器（130），在该检测器上瞄准干涉图像。 干涉仪（120）的透射率被光谱分割成至少两个分开的波长带。 对于其部分，检测器（130）被布置成在空间上检测来自至少两个分开的波长带的干涉图像。 检测器被布置成通过利用被校准为干涉仪的反射镜间隙的函数的检测器的图像元素的响应来同时检测所述波长带，以便同时检测至少两个不同的干涉次序。 借助于本发明，可以更快地实现光谱测量，或者一次获得关于物体的更多信息。

公开(公告)号：US08233147B2

公开(公告)日：2012-07-31

申请号：US12524335

申请日：2008-01-23

申请人： Heikki Saari

发明人： Heikki Saari

IPC分类号： G01J3/28

CPC分类号： G01J3/10 ,  G01J3/26 ,  G01J3/433 ,  G02B26/001

摘要： The invention relates to a spectrometer for material analysis and to a control method for a spectrometer. The spectrometer includes a radiant source (140) formed by multiple single radiation sources (141) having different central wavelengths, for generating a measuring signal, a measurement object (100) containing a material to be analyzed, at least one electrically tunable Fabry-Perot filter (120, 220) for the band pass filtering the measuring signal by at least two pass bands, and a detector (300, 400) for detecting said filtered measuring signals received from the measurement object (100). The spectrometer has: means (312) for modulating each of the single radiation sources (141) and correspondingly means (307, 309) for demodulating the detected signals such that the signal from each single radiation source can be distinguished from each other in the detector (300, 400); and means for detecting (300, 400) and demodulating (306, 307) multiple pass hands simultaneously.

摘要翻译： 本发明涉及用于材料分析的光谱仪和用于光谱仪的控制方法。 光谱仪包括由具有不同中心波长的多个单一辐射源（141）形成的用于产生测量信号的辐射源（140），包含待分析材料的测量对象（100），至少一个电可调节法布里 - 珀罗 滤波器（120,220），用于通过至少两个通带对测量信号进行带通滤波;以及检测器（300,400），用于检测从测量对象（100）接收的所述滤波的测量信号。 光谱仪具有：用于调制单个辐射源（141）中的每一个的装置（312）和用于解调检测到的信号的对应装置（307,309），使得来自每个单个辐射源的信号可以在检测器中彼此区分开 （300,400）; 以及同时检测（300,400）和解调（306,307）多个传球手的装置。