发明申请
US20150153566A1 MICROMIRROR AND MANUFACTURING METHOD FOR AT LEAST ONE MICROMIRROR WHICH IS SITUATABLE OR SITUATED IN A MICROMIRROR DEVICE
有权
用于至少一个在微镜器件中可视或形成的微型计算机的微型计算机和制造方法
- 专利标题： MICROMIRROR AND MANUFACTURING METHOD FOR AT LEAST ONE MICROMIRROR WHICH IS SITUATABLE OR SITUATED IN A MICROMIRROR DEVICE
- 专利标题（中）： 用于至少一个在微镜器件中可视或形成的微型计算机的微型计算机和制造方法
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申请号： US14553707申请日： 2014-11-25
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公开(公告)号： US20150153566A1公开(公告)日： 2015-06-04
- 发明人: Simon Armbruster , Helmut Grutzeck , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Stefan Pinter , Rainer Straub , Zoltan Lestyan
- 申请人： Robert Bosch GmbH
- 优先权： DE102013224631.5 20131129
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; G02B1/12
摘要：
A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.
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