发明申请
US20150158722A1 SYSTEMS AND APPARATUS HAVING MEMS ACOUSTIC SENSORS AND OTHER MEMS SENSORS AND METHODS OF FABRICATION OF THE SAME
有权
具有MEMS声学传感器和其他MEMS传感器的系统和装置及其制造方法
- 专利标题： SYSTEMS AND APPARATUS HAVING MEMS ACOUSTIC SENSORS AND OTHER MEMS SENSORS AND METHODS OF FABRICATION OF THE SAME
- 专利标题（中）： 具有MEMS声学传感器和其他MEMS传感器的系统和装置及其制造方法
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申请号： US14618251申请日： 2015-02-10
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公开(公告)号： US20150158722A1公开(公告)日： 2015-06-11
- 发明人: Martin Lim , Fariborz Assaderaghi
- 申请人： INVENSENSE, INC.
- 主分类号： B81B7/00
- IPC分类号： B81B7/00 ; B81C1/00
摘要：
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated circuit disposed at a second location of the substrate, wherein the first integrated circuit is electrically coupled to the MEMS microphone; and a MEMS measurement device at a third location, wherein the MEMS measurement device comprises a motion sensor and a pressure sensor.