发明申请
- 专利标题: Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
- 专利标题(中): 用于聚焦多个带电粒子束的多轴磁镜
-
申请号: US14572052申请日: 2014-12-16
-
公开(公告)号: US20150179384A1公开(公告)日: 2015-06-25
- 发明人: Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
- 申请人: Hermes-Microvision, Inc.
- 主分类号: H01J3/20
- IPC分类号: H01J3/20
摘要:
A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
公开/授权文献
信息查询