发明申请
US20150179384A1 Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
用于聚焦多个带电粒子束的多轴磁镜

  • 专利标题: Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
  • 专利标题(中): 用于聚焦多个带电粒子束的多轴磁镜
  • 申请号: US14572052
    申请日: 2014-12-16
  • 公开(公告)号: US20150179384A1
    公开(公告)日: 2015-06-25
  • 发明人: Zhongwei ChenWeiming RenXuerang HuXuedong Liu
  • 申请人: Hermes-Microvision, Inc.
  • 主分类号: H01J3/20
  • IPC分类号: H01J3/20
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
摘要:
A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
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