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公开(公告)号：US11328894B2
公开(公告)日：2022-05-10
申请号：US16047987
申请日：2018-07-27
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Xinan Luo , Zhongwei Chen
IPC分类号： H01J37/153 , H01J37/147 , H01J37/05 , H01J37/14 , H01J37/244 , H01J37/28
摘要： Systems and methods are provided for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus. Embodiments of the present disclosure provide a dispersion device comprising an electrostatic deflector and a magnetic deflector configured to induce a beam dispersion set to cancel the dispersion generated by the beam separator. The combination of the electrostatic deflector and the magnetic deflector can be used to keep the deflection angle due to the dispersion device unchanged when the induced beam dispersion is changed to compensate for a change in the dispersion generated by the beam separator. In some embodiments, the deflection angle due to the dispersion device can be controlled to be zero and there is no change in primary beam axis due to the dispersion device.
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公开(公告)号：US09691586B2
公开(公告)日：2017-06-27
申请号：US15403749
申请日：2017-01-11
发明人： Weiming Ren , Shuai Li , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/147 , H01J37/28
CPC分类号： H01J37/28 , H01J37/12 , H01J37/1472 , H01J2237/04924 , H01J2237/083 , H01J2237/1205 , H01J2237/1516 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
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公开(公告)号：US20170025243A1
公开(公告)日：2017-01-26
申请号：US15216258
申请日：2016-07-21
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/147 , H01J37/10 , H01J37/06
CPC分类号： H01J37/1474 , H01J37/06 , H01J37/10 , H01J37/1477 , H01J37/1478 , H01J37/28 , H01J2237/024 , H01J2237/0453 , H01J2237/0492 , H01J2237/103 , H01J2237/1205 , H01J2237/1516 , H01J2237/1534 , H01J2237/1536
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit forms plural and parallel images of one single electron source by deflecting plural beamlets of a parallel primary-electron beam therefrom, and one objective lens focuses the plural deflected beamlets onto a sample surface and forms plural probe spots thereon. A movable condenser lens is used to collimate the primary-electron beam and vary the currents of the plural probe spots, a pre-beamlet-forming means weakens the Coulomb effect of the primary-electron beam, and the source-conversion unit minimizes the sizes of the plural probe spots by minimizing and compensating the off-axis aberrations of the objective lens and condenser lens.
摘要翻译： 提出了一种用于以高分辨率和高吞吐量观察样品的多光束装置。 在该装置中，源极转换单元通过偏转平行的一次电子束的多个子束形成一个单个电子源的多个并行图像，并且一个物镜将多个偏转的子束聚焦在样本表面上并形成多个探针点 上。 使用可移动聚光透镜来准直一次电子束并改变多个探针点的电流，前束形成装置削弱一次电子束的库仑效应，并且源转换单元使尺寸最小化 通过最小化和补偿物镜和聚光透镜的离轴像差来实现多个探测点。
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公开(公告)号：US20160268096A1
公开(公告)日：2016-09-15
申请号：US15065342
申请日：2016-03-09
发明人： Weiming Ren , Shuai Li , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/147 , H01J37/10 , H01J37/28 , H01J37/06
CPC分类号： H01J37/28 , H01J37/12 , H01J37/1472 , H01J2237/04924 , H01J2237/083 , H01J2237/1205 , H01J2237/1516 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
摘要翻译： 提出了一种用于以高分辨率和高吞吐量观察样品的多光束装置。 在该装置中，源转换单元将单个电子源改变为虚拟多源阵列，初级投影成像系统投射阵列以在样本上形成多个探针点，并且聚光透镜调节多个探针的电流 斑点。 在源转换单元中，图像形成装置在子束极限装置的上游，从而产生较少散射的电子。 图像形成装置不仅形成虚拟多源阵列，而且补偿多个探测点的离轴像差。
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5.发明申请公开(公告)号：US20160064180A1
公开(公告)日：2016-03-03
申请号：US14833583
申请日：2015-08-24
发明人： Weiming Ren , Xuerang Hu , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/141 , H01J37/28 , H01J37/147
CPC分类号： H01J37/141 , H01J37/1475 , H01J37/28 , H01J2237/141 , H01J2237/1508 , H01J2237/1526 , H01J2237/28 , H01J2237/2817
摘要： A new apparatus of plural charged particle beams with multi-axis magnetic lenses is provided, which comprises a plurality of sub-columns The apparatus employs two modified multi-axis magnetic lenses, and magnetic sub-lenses thereof therefore function as the objective lenses and the condenser lenses of all the sub-columns respectively. The plurality of sub-columns can perform the same function or different functions required for observing a surface of a specimen, such as high-throughput inspection and high-resolution review of interested features thereon. Accordingly, the apparatus can be used as a yield management tool in semiconductor manufacturing industry.
摘要翻译： 提供了具有多轴磁透镜的多个带电粒子束的新装置，其包括多个子列。该装置采用两个改进的多轴磁性透镜，并且其磁性子透镜因此用作物镜，并且 所有子列的聚光透镜分别。 多个子列可以执行用于观察样本表面所需的相同功能或不同的功能，例如高通量检测和对其感兴趣的特征的高分辨率检查。 因此，该装置可以用作半导体制造业的屈服管理工具。
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公开(公告)号：US09177758B2
公开(公告)日：2015-11-03
申请号：US14564921
申请日：2014-12-09
发明人： Zhongwei Chen , Jack Jau , Weiming Ren , Chiyan Kuan , Yixiang Wang , Xiaoli Guo , Feng Cao
CPC分类号： H01J37/261 , H01J37/226 , H01J37/244 , H01J37/28 , H01J2237/063 , H01J2237/10 , H01J2237/24475 , H01J2237/24495 , H01J2237/24528 , H01J2237/2801 , H01J2237/2804 , H01J2237/2806 , H01J2237/2814
摘要： The present invention provides a dual-beam apparatus which employs the dark-field e-beam inspection method to inspect small particles on a surface of a sample such as wafer and mask with high throughput. The dual beam apparatus comprises two single-beam dark-field units placed in a same vacuum chamber and in two different orientations. The two single-beam dark-field units can perform the particle inspection separately or almost simultaneously by means of the alternately-scanning way. The invention also proposes a triple-beam apparatus for both inspecting and reviewing particles on a sample surface within the same vacuum chamber. The triple-beam apparatus comprises one foregoing dual-beam apparatus performing the particle inspection and one high-resolution SEM performing the particle review.
摘要翻译： 本发明提供一种双光束装置，其采用暗场电子束检查方法以高生产量检查诸如晶片和掩模的样品表面上的小颗粒。 双光束装置包括放置在相同真空室中并具有两个不同取向的两个单光束暗场单元。 两个单光束暗场单元可以通过交替扫描方式分别或几乎同时进行粒子检测。 本发明还提出了一种用于检查和检查在相同真空室内的样品表面上的颗粒的三光束装置。 三光束装置包括执行颗粒检查的一个前述双光束装置和执行颗粒检查的一个高分辨率SEM。
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公开(公告)号：US20150248990A1
公开(公告)日：2015-09-03
申请号：US14608828
申请日：2015-01-29
发明人： Weiming Ren , Shuai Li , Zhongwei Chen
CPC分类号： H01J37/05 , H01J37/10 , H01J37/12 , H01J37/244 , H01J37/263 , H01J2237/057 , H01J2237/12 , H01J2237/14
摘要： This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.
摘要翻译： 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。
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公开(公告)号：US09117626B1
公开(公告)日：2015-08-25
申请号：US14608828
申请日：2015-01-29
发明人： Weiming Ren , Shuai Li , Zhongwei Chen
IPC分类号： H01J37/12
CPC分类号： H01J37/05 , H01J37/10 , H01J37/12 , H01J37/244 , H01J37/263 , H01J2237/057 , H01J2237/12 , H01J2237/14
摘要： This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.
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9.发明授权公开(公告)号：US09105440B2
公开(公告)日：2015-08-11
申请号：US14468674
申请日：2014-08-26
发明人： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC分类号： H01J37/141 , H01J37/145 , H01J37/28
CPC分类号： H01J37/141 , H01J37/145 , H01J37/28 , H01J2237/141 , H01J2237/1415 , H01J2237/15 , H01J2237/281 , H01J2237/2817
摘要： An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.
摘要翻译： 提供具有多轴磁性透镜的多个带电粒子束的装置，以执行观察样品表面的多功能，例如高通量检测和其感兴趣特征的高分辨率检查以及用于增强图像对比度的充电控制 和图像分辨率。 在该装置中，形成两个或多个子列，并且每个子列执行多功能之一。 基本上，子列采取正常照明以获得高图像分辨率，但是一个或多个可能采取倾斜照明以获得高图像对比度。
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公开(公告)号：US09048063B1
公开(公告)日：2015-06-02
申请号：US14611854
申请日：2015-02-02
发明人： Weiming Ren , Shuai Li , Zhongwei Chen
IPC分类号： H01J37/12
CPC分类号： H01J37/12 , H01J37/05 , H01J2237/04924 , H01J2237/0535 , H01J2237/057 , H01J2237/24485 , H01J2237/28
摘要： This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.
摘要翻译： 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。
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