发明申请
- 专利标题: DYNAMIC RANDOM ACCESS MEMORY CELL WITH SELF-ALIGNED STRAP
- 专利标题(中): 动态随机访问存储器单元与自对准的条纹
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申请号: US14158956申请日: 2014-01-20
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公开(公告)号: US20150206884A1公开(公告)日: 2015-07-23
- 发明人: John E. Barth, Jr. , Kangguo Cheng , Herbert L. Ho , Ali Khakifirooz , Ravikumar Ramachandran , Kern Rim , Reinaldo A. Vega
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/311 ; H01L21/02 ; H01L29/06 ; H01L29/417
摘要:
After formation of trench capacitors and source and drain regions and gate structures for access transistors, a dielectric spacer is formed on a first sidewall of each source region, while a second sidewall of each source region and sidewalls of drain regions are physically exposed. Each dielectric spacer can be employed as an etch mask during removal of trench top dielectric portions to form strap cavities for forming strap structures. Optionally, selective deposition of a semiconductor material can be performed to form raised source and drain regions. In this case, the raised source regions grow only from the first sidewalls and do not grow from the second sidewalls. The raised source regions can be employed as a part of an etch mask during formation of the strap cavities. The strap structures are formed as self-aligned structures that are electrically isolated from adjacent access transistors by the dielectric spacers.
公开/授权文献
- US09564443B2 Dynamic random access memory cell with self-aligned strap 公开/授权日:2017-02-07
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