发明申请
- 专利标题: CERAMIC MATERIAL AND SPUTTERING TARGET MEMBER
- 专利标题(中): 陶瓷材料和溅射目标会员
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申请号: US14692955申请日: 2015-04-22
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公开(公告)号: US20150225298A1公开(公告)日: 2015-08-13
- 发明人: Yosuke SATO , Yoshinori ISODA , Yuji KATSUDA
- 申请人: NGK Insulators, Ltd.
- 优先权: JP2012-245464 20121107
- 主分类号: C04B35/04
- IPC分类号: C04B35/04 ; C23C14/34
摘要:
A ceramic material of the present invention contains magnesium, zirconium, lithium, and oxygen as main components. The crystal phase of a solid solution obtained by dissolving zirconium oxide and lithium oxide in magnesium oxide is a main phase. The XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.89° or less which is smaller than an angle at which a peak of a cubic crystal of magnesium oxide appears. The XRD peak more preferably appears at 2θ=42.38° to 42.89° and further preferably at 2θ=42.82° to 42.89°. In the ceramic material, the molar ratio Li/Zr of Li to Zr is preferably in the range of 1.96 or more and 2.33 or less.
公开/授权文献
- US09409824B2 Ceramic material and sputtering target member 公开/授权日:2016-08-09
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