发明申请
- 专利标题: FLEXIBLE TFT BACKPANEL BY GLASS SUBSTRATE REMOVAL
- 专利标题(中): 透明玻璃底板去除柔性TFT背板
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申请号: US14216920申请日: 2014-03-17
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公开(公告)号: US20150263078A1公开(公告)日: 2015-09-17
- 发明人: Chan-Long Shieh , Fatt Foong , Gang Yu , Guangming Wang
- 申请人: Chan-Long Shieh , Fatt Foong , Gang Yu , Guangming Wang
- 主分类号: H01L27/32
- IPC分类号: H01L27/32 ; H01L51/52 ; H01L29/786 ; H01L51/56 ; H01L51/00 ; H01L27/12
摘要:
A process of fabricating a flexible TFT back-panel on a glass support includes a step of providing a flat glass support member sufficiently thick to prevent bending during the processing. A layer of etch stop material is positioned on the upper surface of the glass support member and an insulating buffer layer is positioned on the layer of etch stop material. A TFT back-panel is positioned on the insulating buffer layer and a flexible plastic carrier is affixed to the TFT back-panel. The glass support member is etched away, whereby a flexible TFT back-panel is provided. The TFT back-panel can include a matrix of either OLED cells or LCD cells.
公开/授权文献
- US09240437B2 Flexible TFT backpanel by glass substrate removal 公开/授权日:2016-01-19
信息查询
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