发明申请
- 专利标题: GAS PROCESSING APPARATUS
- 专利标题(中): 气体加工设备
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申请号: US14633745申请日: 2015-02-27
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公开(公告)号: US20150265740A1公开(公告)日: 2015-09-24
- 发明人: Akio UI , Yosuke Sato , Masato Akita , Yasushi Sanada
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 优先权: JP2014-060064 20140324
- 主分类号: A61L9/16
- IPC分类号: A61L9/16
摘要:
A gas processing apparatus of an embodiment includes: first and second dielectric substrates facing with each other; first and second discharge electrodes respectively disposed on a pair of facing principal surfaces of the dielectric substrates; first and second ground electrodes respectively disposed on a pair of principle surfaces at opposite sides of the principle surfaces of the dielectric substrates; a gas flow path to supply gas to be processed between the discharge electrodes; an AC power source to generate first and second plasma-induced flows by applying an AC voltage between the discharge electrodes and the ground electrodes; and a region disposed between the dielectric substrates at downstream of the plasma-induced flows from the discharge electrodes, and a gap between the dielectric substrates being 1.3 times or less of a sum of thicknesses of the plasma-induced flows.
公开/授权文献
- US09468698B2 Gas processing apparatus 公开/授权日:2016-10-18
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