Invention Application
US20150274504A1 ANGULAR ACCELERATION SENSOR AND ACCELERATION SENSOR 有权
角加速度传感器和加速度传感器

ANGULAR ACCELERATION SENSOR AND ACCELERATION SENSOR
Abstract:
An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.
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