Invention Application
- Patent Title: ANGULAR ACCELERATION SENSOR AND ACCELERATION SENSOR
- Patent Title (中): 角加速度传感器和加速度传感器
-
Application No.: US14736327Application Date: 2015-06-11
-
Publication No.: US20150274504A1Publication Date: 2015-10-01
- Inventor: Masahiro KITAI , Masayuki ICHIMARU
- Applicant: Murata Manufacturing Co., Ltd.
- Priority: JP2012-271986 20121213
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/08 ; G01P15/12

Abstract:
An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.
Public/Granted literature
- US09682853B2 Angular acceleration sensor and acceleration sensor Public/Granted day:2017-06-20
Information query