公开(公告)号：US20150274504A1

公开(公告)日：2015-10-01

申请号：US14736327

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro KITAI ,  Masayuki ICHIMARU

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12

CPC classification number: B81B3/0051 ,  B81B3/0021 ,  B81B2201/0235 ,  G01P15/0888 ,  G01P15/123 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.

Abstract translation: 角加速度传感器包括沿X-Y平面延伸的平面，固定部分，重量，梁和压电电阻。 重量由固定部分支撑。 梁沿着Y轴延伸并连接到固定部分和重物上。 光束在X轴方向上的宽度大于连接部分的光束与固定部分的连接部分的宽度。

公开(公告)号：US20150247880A1

公开(公告)日：2015-09-03

申请号：US14714504

申请日：2015-05-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki ICHIMARU

IPC: G01P15/12 ,  G01P15/08

CPC classification number: G01P15/123 ,  G01P15/0888 ,  G01P15/18

Abstract: An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion that projects in the X-axis negative direction in the flat plate surface to be opposed to the recessed portion. The beam portion extends from the projecting portion in a Y-axis positive direction in the flat plate surface, and is connected to the recessed portion at an end portion in the Y-axis positive direction. Beam-portion proximity regions of the fixed portion and the weight portion in proximity to connecting positions to the beam portion are plane-symmetrical with respect to a stress neutral plane in the flat plate surface.

Abstract translation: 角加速度传感器包括平板表面，固定部分，重量部分和梁部分。 重物部分包括在平板表面中沿X轴负方向凹陷的凹部。 固定部分包括在平板表面中沿X轴负方向突出以与凹部相对的突出部分。 梁部从平板状的Y轴正方向的突出部延伸，并且在Y轴正方向的端部与凹部连接。 靠近与梁部分的连接位置的固定部分和重量部分的光束部分邻近区域相对于平板表面中的应力中性平面是平面对称的。

公开(公告)号：US20150247878A1

公开(公告)日：2015-09-03

申请号：US14714539

申请日：2015-05-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki ICHIMARU

IPC: G01P15/09

CPC classification number: G01P15/0922 ,  G01P15/123

Abstract: An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion projecting in the X-axis negative direction in the flat plate surface to be opposed to the recessed portion, and a slit extending inward in an X-axis positive direction from a position adjacent to the projecting portion. The beam portion extends along the Y-axis in the flat plate surface, is connected between the recessed portion and the projecting portion, and supports the weight portion movably relative to the fixed portion.

Abstract translation: 角加速度传感器包括平板表面，固定部分，重量部分和梁部分。 重物部分包括在平板表面中沿X轴负方向凹陷的凹部。 固定部分包括在平板表面上沿X轴负方向突出以与凹部相对的突出部分，以及从与突出部分相邻的位置沿X轴正方向向内延伸的狭缝。 梁部分沿着平板表面中的Y轴延伸，连接在凹部和突出部分之间，并且相对于固定部分可移动地支撑重物部分。

公开(公告)号：US20140047919A1

公开(公告)日：2014-02-20

申请号：US14064371

申请日：2013-10-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki ICHIMARU

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01P15/0888

Abstract: An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction.

Abstract translation: 角加速度检测装置包括旋转锤，固定部，支撑梁和检测部。 通过围绕Z轴的角加速度产生的惯性力的作用，旋转重量可相对于固定部分绕Z轴旋转。 固定部分设置在与旋转重物间隔开的位置。 支撑梁设置在固定部分和旋转重物之间的X-Y平面中，支撑梁相对于固定部分弹性地支撑旋转重量。 检测部输出对应于在支撑梁中产生的应力的检测信号。 当从Z轴方向观察时，旋转重物的重心位置与支撑梁对准。

公开(公告)号：US20180238751A1

公开(公告)日：2018-08-23

申请号：US15955729

申请日：2018-04-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shingo CHIDA ,  Yuya GENMEI ,  Masayuki ICHIMARU

IPC: G01L1/16 ,  H01L41/053 ,  H01L41/113 ,  H01L41/083 ,  H01L41/187 ,  H01L41/047 ,  G01B7/16

CPC classification number: G01L1/16 ,  G01B7/16 ,  H01L41/0477 ,  H01L41/053 ,  H01L41/083 ,  H01L41/1132 ,  H01L41/1876

Abstract: A piezoelectric deflection sensor includes a first package substrate bonded onto a first principal surface of a first piezoelectric plate via a first bonding material layer, and a second package substrate bonded onto a second principal surface of the first piezoelectric plate via a second bonding material layer. A second electrode is provided on a principal surface of the first piezoelectric plate, and first and second segmented electrodes are provided on the other. A polarization axis direction of the first piezoelectric plate is parallel or substantially parallel to the first and second principal surfaces and is a direction along any side of the first piezoelectric plate. A groove extending in a direction intersecting the polarization axis direction in the first package substrate is provided at a position overlapping with at least a portion of a first electrode non-formation region between the first and second segmented electrodes in plan view.

公开(公告)号：US20170160147A1

公开(公告)日：2017-06-08

申请号：US15433158

申请日：2017-02-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuya GENMEI ,  Jiro INOUE ,  Masayuki ICHIMARU

IPC: G01L1/16 ,  H01L41/04 ,  H01L41/113 ,  H01L41/053 ,  G01B7/16 ,  H01L41/047

CPC classification number: G01L1/162 ,  G01B7/16 ,  G01B7/22 ,  H01L41/042 ,  H01L41/047 ,  H01L41/0533 ,  H01L41/1132

Abstract: A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.

公开(公告)号：US20150276788A1

公开(公告)日：2015-10-01

申请号：US14736547

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro KITAI ,  Masayuki ICHIMARU

IPC: G01P15/08

CPC classification number: G01P15/0888 ,  G01P15/123 ,  G01P15/18 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.

Abstract translation: 角加速度传感器包括沿X-Y平面延伸的平面，固定部分，重量，梁和压电电阻。 重量由固定部分支撑。 梁沿着Y轴延伸并且连接到固定部分和重物。 梁包括在Z轴方向上延伸穿过的通孔和沿X轴方向突出的突起。 压电电阻器的Y轴方向的位置与通孔的位置重叠，并且与宽度方向突起的位置偏移。