公开(公告)号：US20150274504A1

公开(公告)日：2015-10-01

申请号：US14736327

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro KITAI ,  Masayuki ICHIMARU

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12

CPC classification number: B81B3/0051 ,  B81B3/0021 ,  B81B2201/0235 ,  G01P15/0888 ,  G01P15/123 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.

Abstract translation: 角加速度传感器包括沿X-Y平面延伸的平面，固定部分，重量，梁和压电电阻。 重量由固定部分支撑。 梁沿着Y轴延伸并连接到固定部分和重物上。 光束在X轴方向上的宽度大于连接部分的光束与固定部分的连接部分的宽度。

公开(公告)号：US20150276788A1

公开(公告)日：2015-10-01

申请号：US14736547

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro KITAI ,  Masayuki ICHIMARU

IPC: G01P15/08

CPC classification number: G01P15/0888 ,  G01P15/123 ,  G01P15/18 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.

Abstract translation: 角加速度传感器包括沿X-Y平面延伸的平面，固定部分，重量，梁和压电电阻。 重量由固定部分支撑。 梁沿着Y轴延伸并且连接到固定部分和重物。 梁包括在Z轴方向上延伸穿过的通孔和沿X轴方向突出的突起。 压电电阻器的Y轴方向的位置与通孔的位置重叠，并且与宽度方向突起的位置偏移。