A method for manufacturing a semiconductor device includes providing a semiconductor substrate having first and second sides, laterally spaced semiconductor devices integrated into the semiconductor substrate, and a drift region of a first conductivity type. Trenches are formed in the semiconductor substrate at the first side of the semiconductor substrate between laterally adjacent semiconductor devices, each of the trenches having two sidewalls and a bottom. First doping zones of a second conductivity type are formed in the semiconductor substrate at least along the sidewalls of the trenches. The first doping zones form pn-junctions with the drift region. Second doping zones of the first conductivity type are formed in the semiconductor substrate at least along a part of the bottom of the trenches. The second doping zones adjoin the drift region. The semiconductor substrate is cut along the second doping zones in the trenches to separate the semiconductor devices.