发明申请
- 专利标题： METAL HARDMASK COMPOSITIONS
- 专利标题（中）： 金属HARDMASK组合物
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申请号： US14750180申请日： 2015-06-25
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公开(公告)号： US20150291829A1公开(公告)日： 2015-10-15
- 发明人: Deyan Wang , Jibin Sun , Peter Trefonas , Kathleen M. O'Connell
- 申请人： Rohm and Haas Electronic Materials LLC
- 主分类号： C09D133/14
- IPC分类号： C09D133/14
摘要：
The invention provides a composition comprising at least the following A and B: A) a polymer comprising, in polymerized from, at least one “monomer that comprises at least one hydroxyl group;” and B) an organometal compound comprising at least one metal selected from Ti, Zr, Hf, Co, Mn, Zn, or combinations thereof, and wherein the organometal compound is present in an amount greater than 5 weight percent, based on the sum weight of A and B.
公开/授权文献
- US09562169B2 Metal hardmask compositions 公开/授权日：2017-02-07
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