发明申请
US20150309125A1 Monolithic Three-Axis Magnetometer 审中-公开
单片三轴磁力仪

  • 专利标题: Monolithic Three-Axis Magnetometer
  • 专利标题(中): 单片三轴磁力仪
  • 申请号: US14262804
    申请日: 2014-04-28
  • 公开(公告)号: US20150309125A1
    公开(公告)日: 2015-10-29
  • 发明人: Yue HuangJue Lu
  • 申请人: Yue HuangJue Lu
  • 申请人地址: US MI East Lansing
  • 专利权人: LABSYS LLC
  • 当前专利权人: LABSYS LLC
  • 当前专利权人地址: US MI East Lansing
  • 主分类号: G01R33/02
  • IPC分类号: G01R33/02 G01R33/00
Monolithic Three-Axis Magnetometer
摘要:
A three-axis magnetic field sensing device, a magnetometer, and methods of fabricating and testing are presented. The magnetometer comprises a plurality of sloped surfaces. A plurality of magnetic sensing units is disposed on the slopes. A magnetic field can be measured by the sensing units. Each of the three orthogonal-axis components of the magnetic field, a Euclidean vector, can then be solved by using a simple algorithm as an expression of the sensing unit measurement values and slope angles. Polarization, testing and characterization of the device could be done by applying a magnetic field along a common axis to all sensing units, along which each sensing unit has sensitivity.
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