公开(公告)号：US20150309125A1

公开(公告)日：2015-10-29

申请号：US14262804

申请日：2014-04-28

申请人： Yue Huang ,  Jue Lu

发明人： Yue Huang ,  Jue Lu

IPC分类号： G01R33/02 ,  G01R33/00

CPC分类号： G01R33/0206 ,  G01R33/0005 ,  G01R33/0052

摘要： A three-axis magnetic field sensing device, a magnetometer, and methods of fabricating and testing are presented. The magnetometer comprises a plurality of sloped surfaces. A plurality of magnetic sensing units is disposed on the slopes. A magnetic field can be measured by the sensing units. Each of the three orthogonal-axis components of the magnetic field, a Euclidean vector, can then be solved by using a simple algorithm as an expression of the sensing unit measurement values and slope angles. Polarization, testing and characterization of the device could be done by applying a magnetic field along a common axis to all sensing units, along which each sensing unit has sensitivity.

摘要翻译： 介绍了一种三轴磁场检测装置，磁力计，以及制造和测试方法。 磁力计包括多个倾斜表面。 多个磁感测单元设置在斜面上。 可以通过感测单元来测量磁场。 然后可以通过使用简单算法作为感测单元测量值和倾斜角的表达式来解决磁场的三个正交轴分量中的每一个，即欧几里得矢量。 器件的极化，测试和表征可以通过沿着公共轴施加磁场到所有感测单元来完成，每个感测单元沿着该磁场具有灵敏度。